特集：ナノ材料のプラズマプロセッシング
ナノ材料のプラズマプロセシングの研究の現状と将来
2013 年 34 巻 10 号 p. 520-527
詳細
2013 年 34 巻 10 号 p. 520-527
This paper reviews production of nanoparticles using low pressure reactive plasmas and its application to quantum dot sensitized solar cells. For the method, nanoparticles of several nm in size with a small size dispersion are produced in gas phase using reactive plasmas, and then the nanoparticles and radicals are co-deposited on a substrate. This method realizes one-step deposition of nanoparticle composite films in a controllable way.
