表面科学
Online ISSN : 1881-4743
Print ISSN : 0388-5321
ISSN-L : 0388-5321
特集: 偏光ツールの最前線
2次元偏光解析による3次元形状計測
津留 俊英山本 治美松川 裕章
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2014 年 35 巻 6 号 p. 300-305

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 A new concept of three-dimensional (3D) shape measurement of specular objects by ellipsometry is proposed. When a glossy object is illuminated by circularly polarized light or unpolarized light, the slope and azimuthal angles of the surface normal vector can be derived by determining the parameters of the reflected polarization states. The 3D shape can be reconstructed using the normal vector of the reflection surface. The method of reading out the surface slope angle and azimuth information by ellipsometry is called tilt-ellipsometry. The tilt is detected using precise optical elements and industrial components. High-speed polarization imaging by a phase modulation method with a liquid crystal variable retarder is also demonstrated. The practical applicability of our method for various research and manufacturing fields is experimentally shown.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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