The growth of single-walled carbon nanotubes (SWCNTs) by hot-filament chemical vapor deposition using Co as a catalyst and Co silicide as a catalyst support was investigated at 450°C. Ethanol vapor was used as the carbon source. The density of grown nanotubes was much higher for the sample formed using Co silicide as the support than for that formed using Si dioxide as the support. Co silicide was found to be more suitable than Si dioxide as the support for nanoparticles of the Co catalyst that triggers nanotube growth. Moreover, Co silicide was suitable for growing SWCNTs with a relatively uniform diameter.