Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD

Toshiki TSUBOTA; Hiroshi AMANO; Taiki KOJO; Naoya MURAKAMI; Teruhisa OHNO

doi:10.2109/jcersj2.121.187

Papers

Synthesis of diamond film and UNCD on BeCu substrate by hot filament CVD

Toshiki TSUBOTA, Hiroshi AMANO, Taiki KOJO, Naoya MURAKAMI, Teruhisa OHNO

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Keywords: CVD diamond, Ultrananocrystalline diamond, Hot filament CVD, BeCu alloy, Electrically conductive diamond

JOURNAL FREE ACCESS

2013 Volume 121 Issue 1410 Pages 187-194

DOI https://doi.org/10.2109/jcersj2.121.187

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Abstract

Diamond film and ultrananocrystalline diamond (UNCD) film were synthesized on BeCu alloy substrate by using hot filament CVD apparatus. We succeed in the synthesis of diamond film and Boron-doped electrically conductive diamond film on the substrate. Moreover, UNCD film was successfully synthesized by the CVD apparatus, although this film was not electrically conductive electrically conductive. At the first stage of the CVD process for UNCD, needle-shape deposits appeared. A two-step process, that is, the synthesis of UNCD and then boron-doped diamond, was effective for the synthesis of the electrically conductive diamond film having smooth surface.

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