Effects of dielectric film surface on oxygen diffusion

Jumpei SUZUKI; Kenji MATSUMOTO; Minoru RYU; Yoshiki IWAZAKI; Toshimasa SUZUKI; Ken WATANABE; Minako HASHIGUCHI; Isao SAKAGUCHI; Naoki OHASHI

doi:10.2109/jcersj2.122.410

Papers

Effects of dielectric film surface on oxygen diffusion

Jumpei SUZUKI, Kenji MATSUMOTO, Minoru RYU, Yoshiki IWAZAKI, Toshimasa SUZUKI, Ken WATANABE, Minako HASHIGUCHI, Isao SAKAGUCHI, Naoki OHASHI

Author information

Jumpei SUZUKI
Taiyo Yuden Co., LTD. Research and Development Laboratory
Kenji MATSUMOTO
Taiyo Yuden Co., LTD. Research and Development Laboratory
Minoru RYU
Taiyo Yuden Co., LTD. Research and Development Laboratory
Yoshiki IWAZAKI
Taiyo Yuden Co., LTD. Research and Development Laboratory
Toshimasa SUZUKI
Taiyo Yuden Co., LTD. Research and Development Laboratory
Ken WATANABE
National Institute for Materials Science
Minako HASHIGUCHI
National Institute for Materials Science
Isao SAKAGUCHI
National Institute for Materials Science
Naoki OHASHI
National Institute for Materials Science

Keywords: Oxygen diffusion, Secondary ion mass spectrometry, Oxygen vacancy, Dislocation, Deformation, Barium titanate, Lattice constant

JOURNAL FREE ACCESS

2014 Volume 122 Issue 1426 Pages 410-414

DOI https://doi.org/10.2109/jcersj2.122.410

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Abstract

The oxygen diffusivity in BaTiO₃ thin films heteroepitaxially grown on SrTiO₃ substrates was investigated using a gas/solid exchange technique with ¹⁸O-isotope-enriched gas. Deformation of the BaTiO₃ lattice and inhibition of the oxygen diffusivity occurred simultaneously when the YSZ layer, which is assumed to be catalytic for the ¹⁸O/¹⁶O exchange reaction, was deposited on BaTiO₃. The mechanism for the reduction in oxygen diffusivity due to the YSZ cover layer is discussed in terms of residual stress in the strained BaTiO₃ layer.

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